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一种碳化硅单晶薄膜的制备方法

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  • Affilication of Author(s):图书馆VIP

  • Disigner of the Invention:黄维,伊艾伦,欧欣,Jin-Shi Xu,Li Chuan-Feng

  • Patent description:发明公开

  • Application Number:201910102753.6

  • Number of Inventors:6

  • Service Invention or Not:no

  • Publication Date:2019-04-19

  • First Author:李强

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